Spare Parts and Components

We can supply you with spare parts for a vast number of sputtering and evaporator machines to keep your system running smoothly

Orings

Shielding

Power Supply

Legacy Parts

Machine Components

Legacy Controllers

Vacuum-grade o-rings are critical sealing components in every sputtering and evaporator system. Degraded or improperly sized o-rings are one of the most common causes of vacuum leaks and contamination. We stock o-rings compatible with CPA, Perkin Elmer, Varian, and other systems, if you know the groove dimensions or part number, we can match it.

Chamber shields protect your vacuum system walls from deposition buildup, reducing contamination and making cleaning faster and easier. Regular shield replacement is essential for maintaining process purity and preventing flaking. We supply shields for a wide range of sputtering and evaporator platforms.

DC and RF power supplies are precision components that directly affect deposition rate, film quality, and process repeatability. We stock replacement power supplies for legacy sputtering systems where OEM parts are no longer available, keeping your equipment running without a costly full system upgrade.

Discontinued doesn't mean unavailable. We maintain inventory of hard-to-find components for legacy sputtering and evaporator systems that OEMs no longer support. If your system is older and your usual supplier can't help, call us, chances are we have what you need or can source it.

Mechanical components including feedthroughs, valves, flanges, shutters, and substrate holders for sputtering and evaporator systems. Keeping these in good condition is essential for repeatable process performance and vacuum integrity.

Obsolete controllers don't have to mean downtime. We stock legacy controller boards and modules for older Perkin Elmer, Varian, and CPA systems. Whether you need a direct replacement to get back online fast or a modern PLC upgrade for long-term reliability, we can help.