CPA H3000

The CPA H3000 Sputtering System is a modular, versatile PVD platform designed to accommodate a wide range of sputtering applications and process requirements. Its modular architecture allows the system to be configured and expanded to meet specific production or research needs.

The standard single-pallet configuration measures approximately 30" wide × 36" long and features a conveyor-style layout, making it well suited for scanning applications and flexible material handling. Overall system length can be customized based on the number of process chambers and modules incorporated into the system.

The H3000 is configured for sputter-down processing and can be equipped with multiple sputtering targets to support a variety of materials and process requirements. A dedicated heat station can also be integrated when elevated substrate temperatures are required.

Standard Configuration Options

• Modular system design for customized process configurations

• Standard pallet size: 30" W × 36" L

• Conveyor-style layout for scanning applications

• Sputter-down configuration

• Multiple sputtering targets available

• Optional integrated heat station

• Available with one or two load locks

• Expandable chamber configuration

• System length can be customized to accommodate additional chambers and process modules

The CPA H3000 can be configured to meet specific process, material handling, and production requirements. Contact CPA to discuss your application and available system configurations.