CHA MK-50 Evaporator System

MARK50

THE CLASSIC HIGH VACUUM DEPOSITION SYSTEM THAT HAS ADVANCED WITH TODAY’S TECHNOLOGY…

CHA Mark50 Systems are available with a wide range of options covering the spectrum from full computer control to manual operation, from production runs to small R&D quantities. They are economical, feature fast loading and unloading, offer broad process flexibility, and accommodate a variety of substrate sizes, shapes, and materials. Their efficiency of design, ease of operation, and unmatched reliability make them an excellent choice for a wide range of production applications.

CHA Mark50 packs the versatility needed for special high-vacuum deposition tasks into a single, compact system. Whether your requirements are best met with sputtering or evaporation processing, the Mark50 system offers the best of both worlds. It is equally productive in either process, and both processes can be accomplished in the same run (i.e., sputter a barrier metal (TiW) and overcoat with aluminum using an E-Beam source).

Mark50 Systems can be configured for a wide range of applications. A broad selection of options, from control systems to process stations to fixturing, let you meet your specific requirements—without compromise. With the Mark50 system, components and controls are combined for an optimum mix of product cost, throughput, and quality.

The entire air-to-air deposition process can be automatically controlled by either CPA’s Siemens-based PLC/PC automation or by CPA’s Simple Controller: both control systems permit fully automatic cycling of the system valves, as well as providing multifunction, semiautomatic control for process development and maintenance-type functions. Separate process control and source control modules are mounted in electronic rack assemblies located in proximity to the deposition chamber. This allows process adjustments to be made as the process is observed.

The optional PLC/PC-based control system automatically controls each step in the air-to-air process, as well as providing a real-time, interactive flat-panel display of system and process status. With PLC controls you can have full control of your process. Visual and audible “pop-up” screens keep the operator aware of system or process faults and include displays of suggested corrective action. The system computer employs the widely used Windows® making operation of the system extremely user friendly.