Perkin Elmer 4400 | Perkin Elmer 4410 | Perkin Elmer 2800
PERKIN ELMER 4410 PERKIN ELMER 4400 PERKIN ELMER 2800
The 4400 Series
of RF Plasma systems for
sputtering and etching reflect an advanced design
concept based
on a high capacity load lock that
permits wafer loading without breaking vacuum in the
process chamber.
Created specifically for the production environment,
this Ultek design provides you with significant
advantages whenever you must combine quality with
high yield and high throughput. The means to handle
almost any thin film coating or etching requirement you may have is provided by a broad range of
operating modes. These include; DC magnetron, RF
magnetron and RF diode sputter deposit, bias
sputter, reactive sputter, sputter etch, plasma etch
and reactive ion etch.
Physical Vapor Deposition PVD coating technology – DC Magnetron sputtering, RF sputtering, Electron Beam Evaporation or
Thermal Evaporation Systems – there is probably a more advanced CPA version that is tested, proven and will give you more for
your money.