CHA Mark 50                                                  CHA Mark 40                        VAT valve upgrade

CHA Mark 40 and 50 systems have become the industry standard for high vacuum deposition systems. The Mark 50 System is             specifically designed for flexibility and long term reliability in high production semiconductor metalization environments. Offering up                         to 50 percent more throughput than any other system and  handling wafers up to six inches, the system delivers unmatched                         operating efficiency. Coupled with a polycold system the run-to-run time is greatly reduced.

                                      

 

Physical Vapor Deposition PVD coating technology – DC Magnetron sputtering, RF sputtering, Electron Beam Evaporation or
Thermal Evaporation Systems – there is probably a more advanced CPA version that is tested, proven and will give you more for
your money.